Cerium Fluoride (CeF3) Sputtering Targets

High quality broadband antireflection coatings are required to reduce the surface reflectivity for optical components used in the long-wave infrared up 15um. Some material properties, such as refractive index, weak absorption in long-wave infrared, good physical bonding compatibility and chemical stability, are essential to infrared coating materials. However, the design and deposition of long-wave broadband antireflection coating have usually been limited because of the selection of coating materials, especially the low refractive index materials.
In the past two decades, more and more attentions have been paid to the rare earth fluorides, such as LaF3, PrF3, YbF3 and YF3. CeF3 is an excellent fluoride with a transparent range from visible to deep ultra violet (DUV) due to its large band gap. CeF3 has a P3C1 crystal structure like LaF3, which make it transparent up to 15um or even longer in the infrared.

Available Products

Cerium Fluoride (CeF3) Plate Targets, Cerium Fluoride (CeF3) Round Targets, Cerium Fluoride (CeF3) Evaporation Materials
Cerium Fluoride (CeF3) Round Targets: Diameter <14inch, Thickness >3mm
Cerium Fluoride (CeF3) Plate Targets: Length <32inch, Width <12inch, Thickness >3mm
Cerium Fluoride (CeF3) Evaporation Materials: 1-3mm pellets, 3-8mm pellets

Purity:99.9% ~ 99.99%
Part No: AEMST-CeF3