Chromium Silicide (CrSi2) Sputtering Targets

Silicides are the product of chemical reactions of metals with silicon. Transition metal silicides have attracted special attention for scientific study and industrial application due to their promising electrical and mechanical properties and their high thermal and chemical stability. Furthermore, most of the transition metal silicides are environmentally friendly materials.

The majority of the silicides are metallic (TiSi2, CoSi2, NiSi, PtSi). Due to their low resistivity they are attractive for application in microelectronics as ohmic contacts, Schottky barriers and interconnection metallisation. Semiconducting silicides, such as CrSi2, MnSi1.7, ß-FeSi2 and ReSi2 have been the subject of extensive research because of their potential thermoelectric application. Furthermore, due to their narrow energy gaps (0.1-0.9 eV) these silicides were under discussion for application in silicon-integrated optoelectronic devices until recently.
(Cite from: Structural Investigations of Thin Chromium Disilicide Films on Silicon, von der Fakultät für Naturwissenschaften der Technisschen Universität Chemnitz genehmigte Dissertation zur Erlangung des akademischen Grades doctor rerum naturalium (Dr. rer. nat.) )

Available Products

Chromium Silicide (CrSi2) Plate Targets, Chromium Silicide (CrSi2) Round Targets, Chromium Silicide (CrSi2) Evaporation Materials
Chromium Silicide (CrSi2) Round Targets: Diameter <14inch, Thickness >3mm
Chromium Silicide (CrSi2) Plate Targets: Length <32inch, Width <12inch, Thickness >3mm
Chromium Silicide (CrSi2) Evaporation Materials: 1-3mm pellets, 3-8mm pellets

Purity:99.50%
Part No:AEMST-CrSi2