Yttrium Oxide (Y2O3) Sputtering Targets
Yttrium oxide, also known as yttria, is Y2O3. It is an air-stable, white solid substance. Yttrium oxide is used as a common starting material for both materials science as well as inorganic compounds. The thermal conductivity of yttrium oxide is 27 W/(m*k)
Material Notes
Yttrium Oxide Sputtering Target, Purity is 99.9%; Circular: Diameter ? 14inch, Thickness ? 1mm; Block: Length ? 32inch, Width ? 12inch, Thickness ? 1mm. Bonding is recommended for these materials. Many materials have characteristics which are not amenable to sputtering, such as, brittleness and low thermal conductivity.This material may require special ramp up and ramp down procedures. This process may not be necessary with other materials. Targets that have a low thermal conductivity are susceptible to thermal shock.